MS-8000 XY Automated Stage
About the MS-8000
The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.
- Closed-loop DC servo control for precise positioning and highly repeatable focusing
- Wide dynamic speed range with XY joystick control
- Proven operation with many popular software packages
Lead Screw Options
|Lead screw pitch options||Rotary encoder resolution||Maximum speed|
|25.40 mm (Ultra-coarse)||88 nm||28 mm/s|
|12.70 mm (Super-coarse)||44 nm||14 mm/s|
|6.35 mm (Standard)||22 nm||7 mm/s|
|1.59 mm (Fine)||5.5 nm||1.75 mm/s|
|0.635 mm (Extra-fine)||2.2 nm||0.7 mm/s|
*Standard lead screw accuracy is 0.25 μm per millimeter