MS-8000 XY Automated Stage

About the MS-8000

The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.

More Info

MS-8000 Features
  • Closed-loop DC servo control for precise positioning and highly repeatable focusing
  • Wide dynamic speed range with XY joystick control
  • Proven operation with many popular software packages

Lead Screw Options

Lead screw pitch options Rotary encoder resolution Maximum speed
25.40 mm (Ultra-coarse) 88 nm 28 mm/s
12.70 mm (Super-coarse) 44 nm 14 mm/s
6.35 mm (Standard) 22 nm 7 mm/s
1.59 mm (Fine) 5.5 nm 1.75 mm/s
0.635 mm (Extra-fine) 2.2 nm 0.7 mm/s

*Standard lead screw accuracy is 0.25 μm per millimeter