MS-8000 XY Automated Stage
About the MS-8000
The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.
More Info
Features
MS-8000 Features
- Closed-loop DC servo control for precise positioning and highly repeatable focusing
- Wide dynamic speed range with XY joystick control
- Proven operation with many popular software packages
Specifications
Linear Encoder Options
Datasheets
Technical Drawings
Lead Screw Options
with 141:1 Anti-Backlash Gear-Head Motors
| Lead screw pitch options | Rotary encoder resolution | Maximum speed |
| 25.40 mm (Ultra-coarse) | 88 nm | 28 mm/s |
| 12.70 mm (Super-coarse) | 44 nm | 14 mm/s |
| 6.35 mm (Standard) | 22 nm | 7 mm/s |
| 1.59 mm (Fine) | 5.5 nm | 1.75 mm/s |
| 0.635 mm (Extra-fine) | 2.2 nm | 0.7 mm/s |
*Standard lead screw accuracy is 0.25 μm per millimeter
with 3.7:1 Gear-Head Motors