The VM-2000-XYZ Micro-Inspector video microscope from ASI is a full featured device that works well in a wide range of applications. The basic VM-2000-XYZ unit consists of a finely crafted optical microscope and camera mounted on one of ASI's precision linear stages plus ASI's automated XY stage and a three-axis controller.

The linear stage provides precise control of focusing through the use of a closed-loop DC servomotor employing a high-resolution rotary encoder for positional feedback. In this arrangement, a focusing resolution of 0.1 µm can easily be achieved. For typical small focusing moves, the repeatability is less than 0.3 µm. With standard rotary encoders, XY repeatability is typically 800 nm. Optional linear encoders improve XY repeatability to less than 300 nm (typical).

The position of the linear stage (point-of-focus) as well as the XY stage coordinates are displayed on the LCD of the MS-2000 control unit and is also available via computer query. Control of XY positioning, Z-axis focusing, and illumination intensity can also be controlled via serial communication. An auto-focus option is also available.

The combination of the finely crafted optical microscope mounted onto one of ASI's precision linear stages combined with one of ASI's automated XY stages allows the Micro-Inspector to be an excellent automated inspection station.

The video microscope offers built-in epi-illumination via a white LED. The LED can easily be exchanged to provide illumination in a range of wavelengths. Since epi-illumination is a reflected illumination from above, i.e., through the objective, the video microscope works very well in inspection applications requiring a reflected light source such as semiconductor manufacturing. Since the basic VM-2000 unit uses a standard filter cube, and the LED's can be selected for a range of excitation wavelenghts, the unit also works very well for fluorescence microscopy applications. For more demanding fluorescence applications, the unit can be used with a scanning monochromator to provide a bright tunable excitation source.

The Micro-Inspector can be mounted, as shown in the photo above, on an optional stand assembly, or can be mounted on a user-supplied base.

The Micro-Inspector can be used with a variety of objective lenses and CCD cameras. The table below shows the approximate magnification on the viewing monitor and the sample field of view for various configurations.