ASI offers a wide range of products for the semiconductor industry. We can automate just about any feature of a common light microscope to increase worker productivity, and reduce repetitive motion. For example, our SZ-2000 model automates popular stereoscopic zooming microscopes.
We can provide precise motion control solutions for inspection and measurement, and we have systems for detecting deep ultraviolet (DUV) and I-line photoresist. We can provide either DC servo motor or stepper motor stages with travel distances up to 380 x 380 mm, and our motorized stages are among the finest in the world.
In fact, our highly accurate MS-2000 and MS-4000 units with linear encoders can offer scale resolutions of 20 nm, and provide repeatability factors down to 300 nm in the XY coordinates. We can also add piezo elements to many stages to obtain much finer Z-axis resolution; for example, our PZ-2000 and PZU-2000 stages have piezo elements incorporated in the top plate of our XY stage. Our MFC-2000 Z-axis drives have the capability for a very fast and accurate auto-focus option that uses any standard analog video signal.
For large XY stage systems, ASI offers the MS-8000 model with 200 x 200 mm of travel. Even larger stages are available, as well as gantry stage systems.
In situations that require stepper motor devices, ASI can provide open-loop stepper motor versions of many of our motorized stages, focus controllers, and linear positioners.
We also offer solutions for micropositioning, confocal microscopy, and multi-wavelength illumination, as well as software services provided by our imaging partners.
