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Wafer Inspection Systems

Wafer Inspection and Mapping Systems Custom Projects and System Solutions

ASI has designed a number of different systems for wafer inspection, mapping, and custom applications.
Our core competencies include:

  • Ultra precise motion control and micropositioning
  • Automation including wafer handling, microscopes, and micromanipulation
  • Auto focus algorithms
  • Microscopy, Fluorescence microscopy, Video microscopy
  • Illumination control including deep UV systems to detect the presence of residual Deep UV or I-Line photoresist on silicon wafers.
  • Mechanical design & custom machining
  • Imaging, CCD & Video cameras
  • Programming

If you have a routine or challenging project, please contact us for further details on the services that we can offer.

Downloads

Wafer Inspection Systems datasheet