MS-8000 XY Automated Stage

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MS-8000 XY Automated Stage

The MS-8000 stage is suited to use with large industrial inspection microscopes such as the Nikon L200/300 series or Olympus MX51/61 series. The open frame allows for transmitted light illumination. The stage can be supplied with either a glass plate insert, or a variety of large format stage inserts, including a vacuum wafer chuck for semiconductor inspection.
The DC servo motor stage is compatible with either small precision anti-backlash gear-head motors or larger spur-head motors for faster speeds. The stage is also compatible with optional high accuracy linear encoders.

Features

Closed-loop DC servo control for precise positioning and highly repeatable focusing
Wide dynamic speed range with XY joystick control
Backlit LCD display shows X, Y, and Z coordinates
“Zero” and “Home” button for simple stand-alone operations
Compact ergonomic tabletop control unit size is 6″D x 9″W x 3″H
Microprocessor control with RS-232 serial and USB communications
Proven operation with many popular software packages

Specifications for Standard Configuration

Lead Screw Options with 141:1 Anti-Backlash Gear-Head Motors
Lead Screw Pitch Option	Encoder Resolution	Maximum Speed	Repeatability
1/4″	22 nm	6.4 mm/sec	0.8 μm
1/2″	44 nm	12 mm/sec	1.6 μm
1″	88 nm	24 mm/sec	3.5 μm

Lead Screw Options with 3.7:1 Gear Head Motors
Lead Screw Pitch Option	Encoder Resolution	Maximum Speed	Repeatability
1/16″	210 nm	30 mm/sec	4.5 μm
1/4″	0.84 μm	120 mm/sec	8.0 μm
1/2″	1.7 μm	240 mm/sec	15.0 μm