MT-2000 XYZ-Theta
Positioning System


MT-2000 XYZ-Theta Positioning System
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The MT-2000 is a high performance positioning system capable of sub-micron resolution. The system, shown, features a 100x100 mm XY stage, a 50mm Z-axis focusing positioner, a vacuum-chuck rotary stage, and a motorized 16X zoom video microscope. The X, Y, Z, and Theta axes derive their precise control through the use of closed-loop DC servomotors employing high-resolution rotary encoders for positioning feedback. By using closed-loop control, there is no chance that the system will become lost, as can occur with open loop micro-stepped positioners after a number of moves and direction changes.

The MT-2000's X, Y, and Z axes utilizes crossed-roller slides, high-precision lead screws, and zero-backlash miniature geared servomotors for smooth and accurate motion. Theta Rotary Stage ComponentThe Theta drive utilizes dual class-7 custom bearings for ultra-low axial/ angular runout, and precision worm gears to turn a one inch table. The microprocessor-controlled MS-2000 control unit provides for RS-232 and USB communication with a host computer plus local control via joystick, control knob and buttons.


Options include XY stages with motion up to 12 inches (300 mm) and Z-axis positioners to 4 inches (100 mm). Optional lead screw choices range from super-coarse to ultra-fine for high-speed versus high-resolution requirement tradeoffs. Linear encoder options are available on the X, Y, and Z axes to provide scale accuracies of 0.5 µm per 10 mm and 1.5 µm per 10 0mm, resolutions down to 50 nm, and repeatabilities better than 300 nm compared to the standard rotary encoder's typical 800 nm rating. The system controller can be configured with optional auto focus capabilities and TTL input and output for triggering and synchronization.

Accessories can include motorized multi-axis micromanipulators and probing devices, zooming video microscopes with various illumination alternatives, cameras, monitors, and much more.


Features

  • Compact ergonomic tabletop control unit size is 9 x 23 x 16½ cm (3½ x 9 x 6½ inches)
  • Closed-loop DC servo control of the X, Y, Z and Theta axes for precise positioning
  • Wide dynamic speed range with adjustable trapezoidal move profiles
  • Electronic torque limit on drives for "built-in" limit protection
  • Sub-micron-scale repeatability on all axes
  • Hall-effect limit sensors on X, Y, and Z axes
  • Smooth adjustable dual-range joystick control
  • Backlit LCD display shows X, Y, Z and Theta coordinates
  • Microprocessor control with RS-232 serial and USB communications
  • "Zero", "Home", and "Zoom" buttons for simple stand-alone operations

Specifications (with standard rotary encoders, 6.35 mm pitch XYZ lead screws, and 5,120:1 Theta worm drive ratio)
XYZ axis range of travel 100 mm x 100 mm x 50 mm (4" x 4" x 2")
XYZ axis resolution < 0.1 µm
XYZ axis RMS repeatability (typical) < 0.8 µm
XYZ axis accuracy 0.25 µ/mm
XYZ axis maximum velocity 7 mm/sec
Theta axis range of travel Unlimited
Theta axis resolution < 7 arc-sec
Theta RMS repeatability (typical) < 30 arc-sec
Theta axis accuracy 100 arc-sec
Theta maximum velocity 20 degrees/sec


XYZ Lead Screw
Pitch Options
Rotary Encoder Resolution Maximum Speed
(Dynamic range = 400)
12.70 mm 176 nm 14 mm/sec
6.35 mm 88 nm 7 mm/sec
1.57 mm 22 nm 1.75 mm/sec
0.318 mm 4.4 nm 0.35 mm/sec


MT-2000 XYZ-Theta Datasheet
(as an 563KB pdf)
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