ASI offers larger custom stages in addition to the standard biological stages that we manufacture. Typically, the standard microscope stages that ASI supplies for biological applications have an XY travel of 100 x 100 mm (4 x 4 inches). While these travel distances work well for biological applications, larger travel distances may be required for semiconductor inspection and other demanding applications. For these applications, ASI offers stages in the standard sizes shown below. By utilizing ASI's proven line of closed-loop DC servomotor electronics, these larger stages can be configured with a wide range of speed and resolution options. Larger stages and gantry stages are also available.
| Part Number / Series |
XY Length of Travel |
| MS-6000 |
150 x 150 mm (6 x 6 inches) |
| MS-8000 |
200 x 200 mm (8 x 8 inches) |
| MS-10000 |
250 x 250 mm (10 x 10 inches) |
| MS-12000 |
300 x 300 mm (12 x 12 inches) |
Features
- Closed-loop DC servo control of the X and Y axes for precise positioning
- Wide dynamic speed range with XY joystick control
- Backlit LCD display shows axis coordinates
- "Zero" and "Home" button for simple stand-alone operations
- Compact ergonomic tabletop control unit size is 9 cm (H) x 23 cm (W) x 16½ cm (D) (3" x 9" x 6")
- Microprocessor control with RS-232 serial and USB communications
- Proven operation with many popular software packages
Specifications (with Rotary Encoders and 6.35 mm pitch Lead Screws)
| XY axis resolution (encoder step) |
0.840 µm |
| XY axis RMS repeatability (typical) |
< 5 µm |
| XY axis maximum velocity |
100 mm/sec |
MS-8000 Lead Screw Options
| Lead Screw Pitch Options |
Rotary Encoder Resolution |
Maximum Speed |
| 25.4 mm (Ultra-coarse) |
3.36 µm |
400 mm/sec |
| 12.70 mm (Super-coarse) |
1.68 µm |
200 mm/sec |
| 6.35 mm (Standard) |
840 nm |
100 mm/sec |
| 1.57 mm (Fine) |
210 nm |
25 mm/sec |
- Standard Lead Screw Accuracy is 0.25 µm per mm.
Optional Linear Encoders - X and Y-axis Linear Encoders for high-accuracy positioning, incorporated into the stage plates
| Axis |
Scale Resolution |
Scale Accuracy |
| XY |
50 nm |
0.5 µm per 10 mm
1.5 µm per 100 mm |
