LS-100 Linear Stage

The LS-100 linear stage provides sub-micron accuracy, and derives precise control through the use of closed-loop DC servomotors employing high-resolution rotary encoders for positioning feedback. The stage utilizes crossed-roller slides, precision lead-screws, and zero-backlash miniature geared DC servomotors for smooth and accurate motion. The unit offers 100 mm (4") of precise travel, can be used either vertically or horizontally, and can carry loads up to 4.5 Kg (10 lbs).

The unit can be configured with a number of lead screw options as outlined in the table below. In our standard configuration, and using ASI's MS-2000 control electronics, resolutions in the 50-to-100 nm range can easily be obtained. Repeatability factors of less than 300 nm (typical) are obtainable with optional linear encoders, while 800 nm is typical with standard rotary encoders.

The MS-2000 controller accepts industry standard commands, provides automatic backlash correction, and allows RS-232 or USB communication with a host computer.

Bottom view of LS-100 Linear Stage
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Top view of LS-100 Linear Stage
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Side view of LS-100 Linear Stage
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Lead Screw Pitch Options Rotary Encoder
Resolution
Maximum Speed
(Dynamic range = 100)
12.70 mm  (super-coarse) 176 nm 14 mm/sec
6.35 mm  (coarse) 88 nm 7 mm/sec
1.57 mm  (fine) 22 nm 1.75 mm/sec
0.317 mm  (ultra-fine) 4.5 nm 0.35 mm/sec
 Standard (6.35 mm) Lead Screw Accuracy is 0.25 µ/mm

Linear Encoder Option

Repeatability Resolution Scale Accuracy
< 300 nm (typ) 20 nm 0.0025 µ/mm

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