We offer a smooth, low-risk migration path from simple manual inspection assistance, to DigBuster©, an advanced inspection system that automatically flags potential defects for expert re-examiniation. The hardware selected initially will support all levels of automation while our entry level software will help your expert easily navigate around the inspected part, map and log the inspection coverage, and easily revisit interesting areas. The rest of the migration path is software upgrades, which you can get from us, from a third party, or can write yourself.
ASI’s DigBuster automated thin-film inspection system uses ASI’s precision closed-loop DC servo motion control technology and video image analysis to optimize inspection. The goal is to optimize the productivity of human expert resources by offering relief from hours of tedious manual inspection. The system automatically flags potential defects like scratches and digs for expert re-inspection as needed.
The system interface permits simple production setup and scanning of thin-film specimens. Flagged objects of interest on color-coded maps are displayed for review and notation by an expert technician or engineer. Clicking on a colored area re-positions the video microscope over the object of interest for closer examination. A text entry window is available for logging additional comments.
Each inspection session produces a text log that details the location and description of each defect found. These logs are formatted for easy importation into a spreadsheet for further analysis.
DigBuster applies client-defined rules to locate, identify, and log likely defects. These rules are maintained in the company’s central data file – a plain-text network file available to all inspection workstations. The structure of this file's content is tailored to the client's own fixtures, thin-film assemblies, and operation, making maximum possible use of the client's in-house nomenclature to ease the transition to automated inspection.
Sample setup data is provided so that the engineer can copy, paste, and modify proven data. The inspection system software provides extensive error reporting to aid the engineer in constructing and debugging this data, with prompt technical support provided by ASI. The software is written in National Instruments LabVIEW™, and the source code is provided with complete DigBuster systems.
Smooth Upgrade Path
ASI expects each application to be unique - the hardware and software can be configured to meet your custom applications. It may be desirable to start with a manual inspection system, and from there, transition to appropriate levels of automation, step by step, without having to buy different hardware platforms for different levels of automation.
The positioning and video hardware permits your operator to easily control the position, zoom, and focus while viewing the sample on a video monitor instead of peering through microscope eyepieces for long periods of time. Computer interfacing can be added, with on-screen motion control and color-coded visual representation of the areas examined. Clicking on the resultant image map returns the camera to that spot for re-inspection, training, or discussion.
Progressive automation can include automatically generated logs in a spreadsheet format containing defect location information, and with provisions for manual entries by your expert operator. Image processing can range from none at all, to simple image enhancement to make defects easier to see, all the way to a full-blown automated defect detection system, which is DigBuster itself.
In these ways, we can help you migrate smoothly to whatever degree of automation you want without any revenue waste from progressive purchases of non-expandable systems.
Hardware Options
ASI can configure the positioning elements of the inspection system to suit your particular specifications. X and Y travel ranges from 100 mm (4”) to 380 mm (15”) and larger, and Z travel ranges from 50 mm (2”) to 200 mm (8”), are available.
The inspection system, pictured above, is based on ASI’s GTS-1500 gantry stage:
| Specifications (GTS-1500, with standard 6.35 mm pitch lead screws) |
| XY axis range of travel |
380 mm x 380 mm (15” x 15”) |
| XY axis resolution |
< 3 µm |
| XY axis RMS repeatability (typical) |
< 5 µm |
| XY axis maximum velocity |
100 mm/sec |
| Z axis range of travel |
100 mm (4") |
| Z axis resolution |
< 0.1 µm |
| Z axis RMS repeatability (typical) |
< 1 µm |
| Z axis maximum velocity |
7 mm/sec |
Video Options
ASI offers a choice of video microscopes available for the thin-film inspection station:
| Video Microscope Magnification Specifications |
| Zoom Ratios |
7X |
12.5X |
16X |
| Min Mag, with 0.25X Objective |
0.071X |
0.049X |
0.047X |
| Max Mag, with 2X Objective |
21X |
25.9X |
32X |
| Max Mag, with 50X Objective |
252X |
312X |
378X |
Analog camera choices include the B&W low-light LC-150 system with 811x508 pixels, or the Color JAI CV S3200 with 752x582 pixels. Digital Color, B&W, and Intensified cameras are available from Cooke, DVC, and Scion, each with greater than 1300x1000 pixels.
Illumination choices include Ring Lights, Coaxial, and Polarized.
Software Specifications
| Configurable Parameters |
| Workstation |
| Workstation Name |
Company Data File Location |
| Defect Rule File Location |
Log File Location |
| Objective Magnification |
Video Magnification |
| Depth of Field |
Minimum and Maximum Zoom |
| Video Image Size |
Pixels per Millimeter |
| Serial Port (COM1…COM4) |
|
|
| Company-wide |
| Pixel Resolution |
Defect Rules |
| Test Criteria |
Fixture Descriptions |
|
| Test Criteria |
| Aperture Outside Radius (mm) |
Defect Rules for Outside Aperture Radius |
| Aperture Inside Radius (mm) |
Defect Rules for Inside Aperture Radius |
| Largest Defect Dimension |
Smallest Defect Dimension |
| Maximum # of Negligible Particles |
Max Mean Separation of Negligible Particles |
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